A ferroelectric memory element has a memory cell array including memory
cells arranged in a matrix configuration, each of the memory cells having
a lower electrode, an upper electrode arranged in a direction
intersecting the lower electrode, and a ferroelectric layer disposed at
least in an intersecting area between the upper electrode and the lower
electrode, wherein a hydrogen barrier film and a hydrogen barrier film
are arranged at least below the memory cell array, and a bottom hydrogen
barrier film is arranged below the memory cell array.