The present invention describes nano-scale fabrication technique used to
create a sub-micron wide gap across the center conductor of a coplanar
waveguide transmission line configured in a fixed-fixed beam arrangement,
resulting in a pair of opposing cantilever beams that comprise an
electro-mechanical switch. Accordingly, a nanometer-scale mechanical
switch with very high switching speed and low actuation voltage has been
developed. This switch is intended primarily for application in the
RF/microwave/wireless industry.