A pumping medium for an electro-osmotic pump made of porous silicon. The
porous silicon may result in a lower required pumping voltage and a
smaller form factor for an equivalent flow rate and pressure generation
as compared to conventional glass frits. The porous silicon may also
provide a better thermodynamic efficiency over conventional glass frits
for use in electro-osmotic pumps. The increased efficiency of the porous
silicon may provide an low-power, high flow rate, high pressure, small
form factor, vibration-free pump for cooling microelectronic devices,
such as integrated circuit chips.