It may be desirable to obtain three-dimensional information on a sample 2
to be studied in an electron microscope. Such information can be derived
from a tilt series 2-i of the sample and a subsequent reconstruction of
the three-dimensional structure by means of a computer algorithm. For a
proper reconstruction of the structure in the volume of the sample it is
important that the measurement geometry be known; therefore it is
important that the images be properly aligned. Therefore markers 8-i
(e.g. gold particles) are applied to the sample, which markers yield
straight lines 10-i as the sample is rotated and projections of that
rotated sample are made onto one image plane. According to the invention
the straight lines are recognized, which gives the possibility to
identify the individual markers in the images of the tilt series, and to
align those images on the basis of the information thus obtained.