A substrate inspection system includes two or more inspection modules
supported on a plate. A chamber is supported beneath the plate by a
translation system, which is configured to provide horizontal
displacement of the chamber under the plate to permit loading and
unloading of a substrate to/from the chamber. Thus, when the chamber is
in a loading/unloading position it is at least partially uncovered from
the plate. The translation system may be further configured to provide
vertical displacement of the chamber with respect to the plate so as to
position an upper surface of a wall of the chamber in close proximity to
a lower surface of the plate when the chamber is in an inspection
position. In such a position, the upper surface of the wall of the
chamber and the lower surface of the plate may be separated by an air
gap.