Various embodiments include a method for providing instructions to a
process tool. The method includes emitting an incident light beam at a
substrate, receiving a reflected light beam from the substrate and
determining a spectrum of the reflected light beam. The method further
includes determining a first property of a first layer of the substrate
and a second property of a second layer of the substrate, based on the
spectrum determination. The method further includes comparing the first
property of the first layer to a first reference property and comparing
the second property of the second layer to a second reference property.
The method further includes determining the instructions based on the
first property comparison and the second property comparison; and
providing the instructions to the process tool.