A swept source Optical coherence tomography system (SSOCT) comprises a
vertical cavity surface-emitting laser with an integrated MEMs tunable
mirror movable by electro-static deflection. The MEMs tunable VCSEL
offers scan rates greater than 100 khz and tuning ranges approaching 200
nm around 1300 nm and 150 nm around 850 nm. In the preferred embodiment
of this invention, a bottom mirror of the VCSEL is comprised of a
Aluminum Gallium Arsenide/Aluminum Oxide DBR stack, and a movable top
mirror is comprised of a TiO2/SiO2 DBR stack. A MEMs tunable VCSEL at
1300 nm is preferably pumped through the top mirror in a wavelength range
between 1050 and 1120 nm, and a MEMs tunable VCSEL at 850 nm is
preferably pumped through the top mirror in a wavelength range between
700 nm and 730 nm.