Improved sensor packaging is provided with a hybrid integration approach.
In one example, an application specific integrated circuit (ASIC) for
sensor signal conditioning is packaged. The ASIC package has an aperture
in it that exposes a chip to chip bonding interface of the ASIC chip. The
rest of the ASIC chip is surrounded by the package, including the
connections between the external package leads and the ASIC chip. A
sensor chip, also having a chip to chip bonding interface, is disposed in
the package aperture and bonded to the ASIC chip such that the two chip
to chip bonding interfaces are connected. Flip chip bonding of the sensor
chip to the ASIC chip is a preferred approach for chip to chip bonding.
The vertical gap between the two chips can be filled in by an underfill
process. The lateral gap between the sensor chip and the package can also
be filled.