Sputtering targets and methods of making sputtering targets are described.
The method includes the steps of: providing a sputtering metal workpiece
made of a valve metal; transverse cold-rolling the sputtering metal
workpiece to obtain a rolled workpiece; and cold-working the rolled
workpiece to obtain a shaped workpiece. The sputtering targets exhibits a
substantially consistent grain structure and/or texture on at least the
sidewalls.