A device for detecting at least one substance of a fluid includes at least
one piezo-acoustic resonator with at least one piezo layer, an electrode
arranged on the piezo-electric layer, at least one other electrode
arranged on the piezo-electric layer and a surface section used for
sorption of the substance of the fluid. The piezo-electric layer, the
electrodes and the surface section are disposed in such a way that
electric control of the electrodes leads to an oscillation of the
resonator at a resonance frequency which depends upon the amount of the
substance which is sorbed on the surface section. The thickness of the
pioelectric layer is in the region of 0.5 to 20 .mu.m and the resonance
frequency of the oscillation ranges from 500 MHz to 2 GHz. The device is
a mass sensor with a piezo-acoustic high-frequency thin film resonator.