An organic EL device having a light emitting element including a first electrode (2), a second electrode (4) of transparent conductive film, and a light emitting organic material layer (9) formed between said first electrode (2) and said second electrode (4), wherein said transparent conductive film is made of a metal oxide deficient in oxygen as compared with stoichiometric composition. Since the transparent conductive film (4) directly in contact with the light emitting organic material layer (9) over a wide area is made of the metal oxide deficient in oxygen as compared with stoichiometric composition, the transparent conductive film can absorb moisture and oxygen which may possibly absorbed by the light emitting organic material layer so that the light emitting organic material layer is prevented from deteriorating, and the long emission lifetime of the element can be ensured.