To provide a fluorescent X-ray analysis apparatus using a polarization for
effectively measuring a minute portion of a sample surface without a
necessary to prepare many kinds of secondary targets. A fluorescent X-ray
analysis apparatus according to the present invention includes an X-ray
tube for generating an X-ray; a sample support portion for supporting a
sample receiving the X-ray; a polarization filter for receiving an X-ray
to be generated from the sample receiving the X-ray; and a detector for
detecting the X-ray from the polarization filter. Then, the X-ray tube,
the sample, the polarization filter, and the detector are arranged so
that three light paths, namely, a light path from the X-ray tube to the
sample, a light path from the sample to the polarization filter, and a
light path from the polarization filter to the detector intersect with
each other at 90 degrees.