A semiconductor device manufacturing method capable of improving the
semiconductor device manufacturing yield is disclosed. Semiconductor
chips are mounted respectively over semiconductor device regions of a
matrix wiring substrate having plural semiconductor device regions,
followed by wire bonding, and thereafter sealing resin is formed at a
time onto the semiconductor device regions. Thereafter, target marks for
dicing are formed on an upper surface of the sealing resin on the basis
of target marks pre-formed on an upper surface of the wiring substrate.
Then, half-dicing is performed from the upper surface side of the sealing
resin 5a on the basis of the target marks for dicing to form grooves
whose bottoms reach the wiring substrate. Subsequently, solder balls are
connected to a lower surface of the wiring substrate and dicing is
performed from a lower surface side of the wiring substrate for division
into individual semiconductor devices.