The present invention discloses apparatus and method for rapidly and
easily measuring the numbers and size distribution of low concentration
particles which exist in a clean space such as a clean room. The
apparatus and method according to the present invention measures the
numbers of particles by charging particles to a monopolarity, collecting
the particles by applying a voltage to an electrode and attaching the
charged particles of a certain size or less thereto, separating the
charged particles of the certain size or more according to size by the
particle separating ducts. The apparatus for measuring the number of
particles according to the present invention makes it possible to obtain
a size distribution of particles in the air by a single measurement and
to rapidly and easily measure it even though the number of the particles
in the air is small.