A spatial light modulator includes a mirror plate comprising a reflective
upper surface, a lower surface, and a substrate portion comprising a
cavity having an opening on the lower surface, a substrate comprising an
upper surface, a hinge support post in connection with the substrate, and
a hinge component supported by the hinge support post and in connection
with the mirror plate, and one or more landing tips configured to contact
the lower surface of the mirror plate to limit rotation of the mirror
plate. The hinge component includes a protrusion that is anchored in a
hole in the top surface of the hinge support post and the hinge component
is configured to extend into the cavity to facilitate rotation of the
mirror plate.