A lithography process for manufacturing bit-island storage mediums that
results in improved resolution and uniformity between bit-islands. The
lithography process includes applying a resist coating polymer to a
surface of a substrate. Selected areas of the resist coating polymer are
then exposed to an energy source, wherein each selected area is exposed
to the energy source multiple times to provide a time-averaged exposure
of the selected areas that reduces errors caused by noise associated with
the energy source. After exposure of the resist coating to the energy
source, a selective developer solution is applied to the resist coating
to develop the fully exposed regions of the resist coating while leaving
undeveloped the partially exposed regions of the resist coating. A
polymer reflow material is applied to the developed resist pattern and
heated to a selected temperature. The polymer reflow material and
selected temperature induce reflow of the developed resist coating such
that such that a circumferential diameter associated with the holes
formed in the resist pattern is reduced to a desired value distance. The
process of inducing reflow of the resist coating can be repeated as
desired to achieve a resist pattern wherein the holes formed in the
resist pattern are reduced to a desired size. The resist pattern formed
on the substrate is then transferred to a magnetic medium to form the
desired pattern of bit-islands.