A method for producing a crystalline film by melting and resolidifying a
film, characterized in preparing a film having a specific region and
obtained either by (A) a step of forming a film in which a "specific
region" and an "region continuous to a periphery of the specific region
and different in thickness from the specific region" co-exist, or by (B)
a step of irradiating a film with an elecrtromagnetic wave or particles
having a mass in mutually different conditions between a specific region
and a peripheral region thereof, and melting and resolidifying at least a
part of the film. As the spatial position of the specific region can be
exactly and easily controlled, it is possible to obtain a crystalline
film in which a crystal grain is formed in a desired position.