A semiconductor structure with an insulating layer on a silicon substrate,
a plurality of electrically-isolated silicon-on-insulator (SOI) regions
separated from the substrate by the insulating layer, and a plurality of
electrically-isolated silicon bulk regions extending through the
insulating layer to the substrate. Each of one number of the SOI regions
is oriented with a first crystal orientation and each of another number
of the SOI regions is oriented with a second crystal orientation that
differs from the first crystal orientation. The bulk silicon regions are
each oriented with a third crystal orientation. Damascene or imprinting
methods of forming the SOI regions and bulk silicon regions are also
provided.