A laser processing apparatus comprising a chuck table, laser beam
irradiation means for irradiating a workpiece held on the chuck table
with a laser beam, and processing feed means for processing-feeding the
chuck table and the laser beam irradiation means relative to each other.
The laser beam irradiation means includes first laser beam irradiation
means for throwing a first pulsed laser beam having a wavelength in the
intermediate-infrared radiation region, and second laser beam irradiation
means for throwing a second pulsed laser beam having a wavelength in the
ultraviolet radiation region. The first laser beam irradiation means and
the second laser beam irradiation means are set such that at least a
part, in the processing feed direction, of the focus spot of the second
pulsed laser beam overlaps the focus spot of the first pulsed laser beam.