The present invention provides a treating agent for a metal
hydride-containing exhaust gas, wherein the treating agent is low in
exothermic property and further high in performance in a treatment of
harm-elimination for the metal hydride-containing exhaust gas, comprises
at least one among metal hydroxide, metal carbonate, basic metal
carbonate, and further supports at least one metal among group-VIII noble
metals on periodic table and silver. Therefore, the performance of
harm-elimination for the metal hydride-containing exhaust gas is
prominently improved. The treating agent in the present invention is high
in performance and further low in exothermic property, thereby that is
useful in the treatment for the metal hydride-containing exhaust gas
generated in semiconductor manufacturing industry and the like.