A microelectromechanical systems (MEMS) device and related methods are
described. The MEMS device comprises a first member having a first
surface and a second member having a second surface, the first and second
surfaces being separated by a gap that is closable by a MEMS actuation
force applied to at least one of the first and second members. A standoff
layer is disposed on the first surface of the first member, the standoff
layer providing standoff between the first and second surfaces upon a
closing of the gap by the MEMS actuation force. The standoff layer
comprises a plurality of nanowires that are anchored to the first surface
of the first member and that extend outward therefrom.