Guidelines for designing lenses or systems for aerodynamic focusing of
nanoparticle or cluster beams. The design process may involve obtaining a
relationship between particle size, operating pressure and aperture size,
and selecting the operating pressure to provide continuum flow of an
aerosol beam through the aerodynamic lens. Particles having diameters
less than 30 nanometer may be focused. Simulation techniques for
evaluating designed lenses are also disclosed.