The ionization chamber is defined by a removable block disposed in heat
transfer relationship to a temperature controlled mounting block,
preferably the removable block comprised of graphite, silicon carbide or
aluminum. The ion source includes a mounting flange for joining the ion
source to the housing of an ion implanter, the ionization chamber being
located on the inside of the mounting flange and the vaporizer being
removably mounted to the exterior of the mounting flange via at least one
isolation valve which is separable from the mounting flange with the
vaporizer, enabling the vaporizer charge volume to be isolated by the
valve in closed position during handling, preferably there being two
isolation valve in series, one unified with and transportable with a
removed vaporizer unit, and one constructed to remain with and isolate
the remainder of the ion source from the atmosphere. In certain preferred
embodiments, two such vaporizers are provided, enabling one to be absent,
while being charged or serviced, while the other operates, or enabling
two different materials to be vaporized without maintenance of the ion
source, or enabling additional quantities of the same materials to be
present to enable a protracted implant run.