A plating method is capable of preferentially precipitating a plated film
fully and uniformly in trenches and via holes according to a mechanical
and electrochemical process, and of easily forming a plated film having
higher flatness surface without being affected by variations in the shape
of trenches and via holes. The plating method includes a first plating
process and a second plating process. The second plating process is
performed by filling a plating solution between an anode and a substrate,
with a porous member placed in the plating solution, repeatedly bringing
the porous member and the substrate into and out of contact with each
other, passing a current between the anode and the substrate while the
porous member is being held in contact with the substrate.