A method is proposed which will enable cavities having optically
transparent walls to be produced simply and cost-effectively in a
component by using standard methods of microsystems technology. For this
purpose, a silicon region is first produced, which is surrounded on all
sides by at least one optically transparent cladding layer. At least one
opening is then produced in the cladding layer. Over this opening, the
silicon surrounded by the cladding layer is dissolved out, forming a
cavity within the cladding layer. In this context, the cladding layer
acts as an etch barrier layer.