In a piezoelectric element, an adhesive layer 12 is provided on a
substrate 11, a first electrode layer 14 made of a noble metal containing
titanium or titanium oxide is provided on the adhesive layer 12, and an
orientation control layer 15 that is preferentially oriented along a
(100) or (001) plane is provided on the first electrode layer 14. In the
vicinity of a surface of the orientation control layer 15 that is closer
to the first electrode layer 14, a (100)- or (001)-oriented region
extends over titanium or titanium oxide located on one surface of the
first electrode layer 14 that is closer to the orientation control layer
15, and the cross-sectional area of the region in the direction
perpendicular to the thickness direction gradually increases in the
direction away from the first electrode layer 14 toward the opposite
side. Further, a piezoelectric layer 16 that is preferentially oriented
along a (001) plane is provided on the orientation control layer 15.