The present invention is to provide a piezoelectric element, a method of
manufacturing the same, a liquid-jet head, a method of manufacturing the
same, and a liquid-jet apparatus, all of which prevent an inter-layer
detachment in a lower electrode. A method of manufacturing a
piezoelectric element, comprising the steps of: forming, on a substrate,
a lower electrode configured of a plurality of layers which includes a
metal layer with a limit thickness of 20 nm at least in its uppermost
layer, the metal layer essentially containing iridium; forming a
multi-layered piezoelectric layers by means of performing a piezoelectric
film forming step a plurality times, the piezoelectric film forming step
including an applying step of applying a piezoelectric precursor film
onto the lower electrode, a drying step of drying the piezoelectric
precursor film which has been applied thereon through the applying step,
a degreasing step of degreasing the piezoelectric precursor film which
has been dried through the drying step, and a baking step of making the
piezoelectric precursor film, which has been degreased through the
degreasing step, into a piezoelectric film by baking and crystallizing
the piezoelectric precursor film; and forming an upper electrode on the
piezoelectric layer.