The concentration of impurities contained in ultrapure water or press
water can be efficiently analyzed with high precision.
A portion of a liquid to be measured is introduced into an absorption
spectrometric portion 2c from a predetermined line. The liquid is
irradiated with exciting light Le from an exciting light irradiation
system 10, and a measurement objet region AS in which a photothermal
effect of the impurities in the liquid is produced by the irradiation is
irradiated with measuring light Lm from a measuring light irradiation
system 20. A change in phase of the measuring light Lm is detected by a
predetermined optical system and a photodetector 36, and the impurity
concentration in the liquid is determined on the basis of the change in
phase.