The main sensor 15 measures the distance Lm to the surface of the pad 2a,
and the sub-sensor 16 measures the distance Ls to the surface of the
reference block 12. What is actually taken as the measured value is the
value of (Lm+Ls). The reference block 12 is used in order to give a
reference position for measuring the surface position of the pad 2a.
Accordingly, correct measurements can be performed even if the position
of the movable element 9 should fluctuate, for example, as a result of
deformation of the guiding and holding plate 7 or guide 8. When the motor
11 is caused to rotate, the ball screw 10 rotates, so that the movable
element 9 moves leftward and rightward, and the distance to the pad 2a is
measured. From the measured data of this distance, the circular-conical
vertical angle, groove depth, thickness, and the like of the pad 2a are
determined.