A transistor epitaxial wafer having: a substrate; an n-type collector layer, a p-type base layer and an n-type emitter layer formed on the substrate in this order; and an n-type InGaAs non-alloy layer having an n-type InGaAs nonuniform composition layer formed on the n-type emitter layer and having an nonuniform indium (In) composition, and an n-type InGaAs uniform composition layer formed on the n-type InGaAs nonuniform composition layer and having a uniform indium (In) composition. The n-type InGaAs nonuniform composition layer has a first layer doped with Si and having a low indium (In) composition, and a second layer formed on the first layer, doped with an n-type dopant except Si, and having an indium (In) composition higher than the first layer.