The present invention provides a beam homogenizer for homogenizing energy
distribution by making the distance between lenses small to shorten the
optical path length with the use of an array lens of an optical path
shortened type, and a laser irradiation apparatus using the beam
homogenizer. The beam homogenizer is equipped with a front side array
lens of an optical path shortened type whose second principal point is
positioned ahead on a beam incidence side, a back side array lens of an
optical path shortened type whose first principal point is positioned
behind on a beam emission side, and a condensing lens, wherein the
distance between the second principal point of the front side array lens
and the first principal point of the back side array lens is equal to the
focal length of the back side array lens.