There is provided a projection optical system for projecting a pattern on
an object surface onto an image surface in a reduced size. The projection
optical system comprising six reflective surfaces that include, in order
of reflecting light from the object surface, a first reflective surface,
a second convex reflective surface, a third convex reflective surface, a
fourth reflective surface, a fifth reflective surface and a sixth
reflective surface, and an aperture stop along an optical path between
the first and second reflective surfaces. And the following condition is
met, where L1 is an interval between the object surface and the surface
apex that is the closest to the object surface, and L2 is an interval
between the surface apex of the first reflective surface and the surface
apex that is the closest to the object
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