An image correction device for use in a pattern inspection apparatus is
disclosed, which has automatic adaptability to variations in density of a
pattern image of a workpiece being tested. The device is operable to
identify a two-dimensional (2D) linear predictive model from the pattern
image of interest and determine the amount of eccentricity of a centroid
position of this model. This amount is then used to switch between a
corrected pattern image due to the 2D linear prediction modeling and a
corrected image that is interpolated by bicubic interpolation techniques.
A pattern inspection method using the image correction technique is also
disclosed.