The present invention in one embodiment provides a method of forming a
memory device including providing a first dielectric layer including at
least one via containing a metal stud; providing a second dielectric
layer atop the first dielectric layer; recessing the metal stud to expose
a sidewall of the via; etching the sidewall of the via in the first
dielectric layer with a isotropic etch step to produce an undercut region
extending beneath a portion of the second dielectric layer; forming a
conformal insulating layer on at least the portion of the second
dielectric layer overlying the undercut region to provide a keyhole;
etching the conformal insulating layer with an anisotropic etch to
provide a collar that exposes the metal stud; forming a barrier metal
within the collar in contact with the metal stud; and forming a phase
change material in contact with the barrier metal.