An object is to provide a laser dicing apparatus and a laser dicing method
capable of speedily performing high-quality dicing without causing any
working defect even in a case where wafers varying in thickness are
supplied. The laser dicing apparatus is provided with a measuring device
which measures thickness of a wafer W, a recording device which stores a
database in which modified region forming conditions associated with
different thicknesses of the wafer W are described, and a control device
which controls the laser dicing apparatus by automatically selecting,
from the database, on the basis of the thickness of the wafer measured by
the measuring device, the modified region forming conditions
corresponding to the measured thickness of the wafer W. The optimum
modified region forming conditions are thereby automatically set, so that
even in a case where wafers W differing in thickness are supplied,
high-quality dicing can be speedily performed without causing a working
defect.