A method and structure for an integrated circuit comprising a first
transistor and an embedded carbon nanotube field effect transistor (CNT
FET) proximate to the first transistor, wherein the CNT FET is
dimensioned smaller than the first transistor. The CNT FET is adapted to
sense signals from the first transistor, wherein the signals comprise any
of temperature, voltage, current, electric field, and magnetic field
signals. Moreover, the CNT FET is adapted to measure stress and strain in
the integrated circuit, wherein the stress and strain comprise any of
mechanical and thermal stress and strain. Additionally, the CNT FET is
adapted to detect defective circuits within the integrated circuit.