A flash NAND type EEPROM system with individual ones of an array of charge
storage elements, such as floating gates, being capacitively coupled with
at least two control gate lines. The control gate lines are preferably
positioned between floating gates to be coupled with sidewalls of
floating gates. The memory cell coupling ratio is desirably increased, as
a result. Both control gate lines on opposite sides of a selected row of
floating gates are usually raised to the same voltage while the second
control gate lines coupled to unselected rows of floating gates
immediately adjacent and on opposite sides of the selected row are kept
low. The control gate lines can also be capacitively coupled with the
substrate in order to selectively raise its voltage in the region of
selected floating gates. The length of the floating gates and the
thicknesses of the control gate lines can be made less than the minimum
resolution element of the process by forming an etch mask of spacers.