Novel positive-working photoresist compositions are disclosed. The
monomers of the base resin of the resist contain diamondoid-containing
pendant groups higher than adamantane in the polymantane series; for
example, diamantane, triamantane, tetramantane, pentamantane,
hexamantane, etc. The diamondoid-containing pendant group may have
hydrophilic-enhancing substituents such as a hydroxyl group, and may
contain a lactone group. Advantages of the present compositions include
enhanced resolution, sensitivity, and adhesion to the substrate.