Fluorinated organosilicon compounds having formula (1) wherein Rf is a perfluoroalkyl group containing at least one ether bond, Q is a polyether group in the form of a homopolymer chain of ethylene glycol or propylene glycol or a copolymer chain of both, R is hydrogen or alkyl, X is a divalent linking group exclusive of oxygen atom, Y is a divalent linking group, p is an integer of at least 3, and n is a number of 0