The electric potential measuring instrument comprises an electrode
arranged on a semiconductor substrate at a position opposite to the
object of measurement and a modulator for modulating the coupling
capacitance between the object of measurement and the electrode. The
electrode is the gate electrode of a field effect type transistor. The
modulated electric current that flows between the source diffusion region
and the drain diffusion region of the field effect type transistor is
synchronously detected by a detection circuit with the modulation
frequency of the modulator. The output signal that appears on the gate
electrode of a field effect transistor can be measured with ease by
changing the coupling capacitance between the electrode of an electric
potential measuring instrument and an object of measurement.