A focused laser beam having an optical axis passes through a first lens
mounted to a first galvanometer and a second lens mounted to a second
galvanometer. The first galvanometer is adapted to tilt the first lens
about a X axis and the second galvanometer is adapted to tilt the second
lens about a Y axis. This displaces the focused laser beam in a
controlled manner from the optical axis to enable laser machining of very
precise geometric features over a large processing window. In a preferred
embodiment, the first and second lenses are a pair of inverted positive
meniscus lenses, of high index of refraction material.