In accordance with the present invention, an integrated micro steam
turbine power plant on-a-chip has been provided. The integrated micro
steam turbine power plant on-a-chip of the present invention comprises a
miniature electric power generation system fabricated using silicon
microfabrication technology and lithographic patterning. The present
invention converts heat to electricity by implementing a thermodynamic
power cycle on a chip. The steam turbine power plant on-a-chip generally
comprises a turbine, a pump, an electric generator, an evaporator, and a
condenser. The turbine is formed by a rotatable, disk-shaped rotor having
a plurality of rotor blades disposed thereon and a plurality of stator
blades. The plurality of stator blades are interdigitated with the
plurality of rotor blades to form the turbine. The generator is driven by
the turbine and converts mechanical energy into electrical energy.