A method and apparatus for coating two sides of a single pane of glass or
other substrate in a single pass through a coating apparatus. A
sputtering line is provided, this line comprising a series of sputtering
chambers. At least one of the chambers comprises a downward sputtering
chamber having an upper target. At least one of the chambers comprises an
upward sputtering chamber having a lower target. In some embodiments, the
upper and lower targets are rotary targets. The coating apparatus
advantageously has a plurality of transport rollers for conveying the
substrate along the sputtering line. In certain embodiments, a majority
of the chambers of the sputtering line are downward sputtering chambers
each having only an upper target with no lower target.