A processing system utilizing a supercritical fluid for treating a
substrate is described as having a pump for recirculating the
supercritical fluid over the substrate. For various applications in
supercritical fluid processing, the fluid temperature for the treatment
process can elevate above the temperature acceptable for safe operation
of the pump. Therefore, in accordance with one embodiment, a fraction of
supercritical fluid from the primary recirculating flow of supercritical
fluid over the substrate is circulated from the pressure side of the
pump, through a heat exchanger to lower the temperature of the
supercritical fluid, through the pump, and it is returned to the primary
flow on the suction side of the pump. In accordance with yet another
embodiment, supercritical fluid is circulated through the pump from an
independent source to vent.