An electrically re-programmable fuse (eFUSE) device for use in integrated
circuit devices includes an elongated heater element, an electrically
insulating liner surrounding an outer surface of the elongated heater
element, corresponding to a longitudinal axis thereof, leaving opposing
ends of the elongated heater element in electrical contact with first and
second heater electrodes. A phase change material (PCM) surrounds a
portion of an outer surface of the electrically insulating liner, a
thermally and electrically insulating layer surrounds an outer surface of
the PCM, with first and second fuse electrodes in electrical contact with
opposing ends of the PCM. The PCM is encapsulated within the electrically
insulating liner, the thermally and electrically insulating layer, and
the first and second fuse electrodes.