A gas laser oscillator includes a supply-side valve for regulating a laser
gas supply to a gas chamber, an exhaust-side valve for regulating a laser
gas exhaust from the gas chamber, a gas pressure measuring device for
measuring a pressure in the gas chamber, and a control device functioning
as a laser gas replacement measuring device. The control device makes a
first measurement and a second measurement of the pressure in the gas
chamber by a gas pressure measuring device at a predetermined time
interval during the vacuuming or purging of the gas chamber, and
determines the laser gas replacement amount per unit time during the
laser oscillating operation, based on the results of the first and second
measurements.