The invention relates to the production of a stacked structure of planes
of islands of a first semiconducting material encapsulated in a second
semiconducting material on a substrate, comprising alternate deposition
of planes of islands of a first semiconducting material and encapsulation
layers of a second semiconducting material, the planes of islands of the
first semiconducting material being made at an optimum growth temperature
and at an optimum precursor gas partial pressure to result in a stacked
structure for which the optical properties enable production of
optoelectronic components to optically interconnect integrated circuits.
The stacked structure is made on a plane of islands of a third
semiconducting material called the sacrificial plane encapsulated in a
fourth semiconducting material, the islands of the sacrificial plane
being made under growth conditions that can result in high densities of
small islands, in other words at a temperature below the optimum growth
temperature and/or at a precursor gas partial pressure greater than the
optimum partial pressure.