A process for fabricating an optically coupled resonant pressure sensor
includes the steps of forming a sensor die including at least one
optically coupled resonator from a first semiconductor substrate and
forming a cap die including a fiber hole from a second semiconductor
substrate. The sensor die and the cap die are aligned and bonded to form
a resonant pressure sensor capsule. The fiber hole in the cap die is
aligned with at least one resonator on the sensor die. Also disclosed is
an optically coupled resonant pressure sensor formed from steps thereof.