Definition of a phase shifting layout from an original layout can be time
consuming. If the original layout is divided into useful groups, i.e.
clusters that can be independently processed, then the phase shifting
process can be performed more rapidly. If the shapes on the layout are
enlarged, then the overlapping shapes can be grouped together to identify
shapes that should be processed together. For large layouts, growing and
grouping the shapes can be time consuming. Therefore, an approach that
uses bins can speed up the clustering process, thereby allowing the phase
shifting to be performed in parallel on multiple computers. Additional
efficiencies result if identical clusters are identified and processing
time saved so that repeated clusters of shapes only undergo the
computationally expensive phase shifter placement and assignment process
a single time.