There are provided a magnetic thin film utilizing a granular film and
having excellent high frequency characteristics and a method of
manufacturing the same, and a multilayered magnetic film and magnetic
components and electronic equipment utilizing the same.A nonreactive
sputtering is performed so that there is no oxidation of a magnetic
metal, and a saturation magnetization is increased to increase a resonant
frequency of permeability. Also, a multi-target simultaneous sputtering
is combined with the nonreactive sputtering so that in a granular
structure including magnetic grains and an insulating layer a size of the
magnetic grains and a thickness of the insulating layer are optimized
thereby ensuring a proper magnitude for a crystalline magnetic anisotropy
within the grains and excellent soft magnetic properties. Further, the
optimization of the thickness of the insulating layer has the effect of
improving a resistivity, decreasing an eddy current and improving an
exchange interaction between the magnetic grains.